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Beam Technologies for Integrated Processing
Language
English
English
Book
Paperback
Beam technologies play an important role in microelectronic component fabrication and offer opportun...
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Libristo code: 04576112
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Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.
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About the book
Full name
Beam Technologies for Integrated Processing
Author
Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems, Commission on Engineering and Technical Systems, Natio
Language
English
English
Binding
Book - Paperback
Date of issue
1992
Number of pages
106
EAN
9780309046350
ISBN
0309046351
Libristo code
04576112
Publishers
National Academies Press
Weight
301
Dimensions
216 x 279
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