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EUV Lithography
Language
English
English
Book
Hardback
EUVL is an area of intense research and this book provides the foundation required for understanding...
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Libristo code: 04883820
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EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
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About the book
Full name
EUV Lithography
Author
Vivek Bakshi
Language
English
English
Binding
Book - Hardback
Date of issue
2009
Number of pages
702
EAN
9780470471555
ISBN
0470471557
Libristo code
04883820
Publishers
John Wiley & Sons Inc
Weight
1582
Dimensions
191 x 259 x 45
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