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Fabrication Engineering at the Micro- and Nanoscale
Language
English
English
Book
Paperback
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectron...
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Libristo code: 13523287
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
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About the book
Full name
Fabrication Engineering at the Micro- and Nanoscale
Author
Stephen A. Campbell
Language
English
English
Binding
Book - Paperback
Date of issue
2012
Number of pages
688
EAN
9780199861224
ISBN
0199861226
Libristo code
13523287
Publishers
Oxford University Press Inc
Weight
1221
Dimensions
192 x 236 x 26
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