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Microsystems Mechanical Design

Language EnglishEnglish
Book Paperback
Book Microsystems Mechanical Design Francesco De Bona
Libristo code: 01464162
Publishers Springer Verlag GmbH, September 2006
This book introduces the basic tools used in the mechanical design of microsystems, the fabrication... Full description
? points 257 b
106.20
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This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.

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