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Novel Silicon Based Technologies
Language
English
English
Book
Hardback
Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemi...
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Libristo code: 01393288
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Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structure
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About the book
Full name
Novel Silicon Based Technologies
Author
R.A. Levy
Language
English
English
Binding
Book - Hardback
Date of issue
1991
Number of pages
277
EAN
9780792311126
Libristo code
01393288
Publishers
Springer Netherlands
Weight
588
Dimensions
155 x 235 x 22
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