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Language
English
English
Book
Hardback
The focus of this book is on the remarkable advances in understanding of low pressure RF (radio freq...
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Libristo code: 04527765
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642 b
642 b
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The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
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About the book
Full name
Plasma Etching
Author
Minoru Sugawara
Language
English
English
Binding
Book - Hardback
Date of issue
1998
Number of pages
356
EAN
9780198562870
ISBN
019856287X
Libristo code
04527765
Publishers
Oxford University Press
Weight
743
Dimensions
163 x 242 x 23
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