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Plasma-Surface Interactions and Processing of Materials

Name: Plasma-Surface Interactions and Processing of Materials
Brand: Springer Netherlands
SKU: 01392866
Price: 305.01 EUR
Availability: InStock
Author: Orlando Auciello
ISBN: 9780792305842

Orlando Auciello

Alberto Gras-Martí

Jose Antonio Valles-Abarca

Daniel L. Flamm

Language

English

Book Hardback

Libristo code: 01392866

Publishers Springer Netherlands, January 1990

An understanding of the processes involved in the basic and applied physics and chemistry of the int... Full description

Libristo code: 01392866

746 b

305.01 €

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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.