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Plasma Electronics
Applications in Microelectronic Device Fabrication
Language
English
English
E-book
Adobe ePub DRM
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed...
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Libristo code: 47538625
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267 b
267 b
110.76
€
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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental
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About the book
Full name
Plasma Electronics
Author
Toshiaki Makabe, Zoran Lj. Petrovic
Language
English
English
Binding
E-book - Adobe ePub DRM
Date of issue
2014
Number of pages
412
EAN
9781040220405
Libristo code
47538625
Publishers
CRC Press
Categories
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