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Silicon Semiconductor Technology
Processing and Integration of Microelectronic Devices
Language
English
English
E-book
Adobe ePub DRM
The book presents the basic steps and the technical implementation of individual processes for micro...
Full description
Libristo code: 45006074
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178 b
178 b
73.67
€
In stock
Immediate digital delivery
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.
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About the book
Full name
Silicon Semiconductor Technology
Author
Ulrich Hilleringmann
Language
English
English
Binding
E-book - Adobe ePub DRM
Date of issue
2023
EAN
9783658410414
Libristo code
45006074
Publishers
Springer Vieweg
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