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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and ac...
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Libristo code: 19308562
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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
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About the book
Full name
Nanopositioning Technologies
Author
CHANGHAI RU
Language
English
English
Binding
Book - Paperback
Date of issue
2018
Number of pages
409
EAN
9783319795393
ISBN
9783319795393
Libristo code
19308562
Publishers
Springer International Publishing AG
Weight
635
Dimensions
155 x 235 x 23
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