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English
Book
Hardback
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and ac...
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Libristo code: 09493694
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249 b
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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
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About the book
Full name
Nanopositioning Technologies
Author
Changhai Ru, Xinyu Liu, Yu Sun
Language
English
English
Binding
Book - Hardback
Date of issue
2015
Number of pages
409
EAN
9783319238524
ISBN
3319238523
Libristo code
09493694
Publishers
Springer International Publishing AG
Weight
966
Dimensions
155 x 235 x 29
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